Session 33: Sensors, MEMS, and BioMEMS – Emerging Nanodevices and Nanoarrays
Wednesday, December 9, 1:30 p.m.
Jefferson Room
Co-Chairs: Dimitrios Peroulis, Purdue University
Naigang Wang, IBM T.J. Watson Research Center
1:35 p.m.
33.1 High Performance and Reliable Silicon Field Emission Arrays Enabled by Silicon Nanowire Current Limiters, S. Guerrera, A. Akinwande, Massachusetts Institute of Technology
We report a high current density (J > 100 A/cm2) cold cathode based on silicon field emitter arrays that operates at low voltage (VGE < 60 V), and has long lifetime. A unique device architecture regulates electron flow to each field emitter tip with a silicon nanowire current limiter.
2:00 p.m.
33.2 Eliminating Proximity Effects and Improving Transmission in Field Emission Vacuum Microelectronic Devices for Integrated Circuits, E. Radauscher, K. Gilchrist*, S. Di Dona, Z. Russell, J. Piascik*, C. Parker, B. Stoner*, and J. Glass, Duke University, *RTI International
This work evaluates crosstalk and transmission efficiency in integrated field emission vacuum microelectronic devices (FE-VMDs). Experimental evidence was used to show proximity effects cannot be neglected. Simulations were used to understand the root cause, design structural solutions, and improve overall device performance. New design features are proposed for improved integration.
2:25 p.m.
33.3 A New Plasma Device Operated in Liquids for Biological Applications, M. Egawa, S. Imai, Y. Sakaguchi, A. Odagawa, Panasonic Corporation
We propose a new MEMS device generating planar plasma in liquids for biological applications. The device was designed with 10 mm distances between via-holes with 2D-FEM. Electric double layer formed by aging at high voltages reduces any resistance variations. Ignored these variations, our device can generate plasmas at nine via-holes.
2:50 p.m.
33.4 Artificially Intelligent Nanoarrays for Disease Detection via Volatolomics (Invited), R. Vishinkin, and H. Haick, Technion – Israel Institute of Technology
According to recent reports, more than 15 million deaths occur annually due to infectious diseases1 and approximately 57 million deaths occurred in 2008 from non-communicable diseases including cancer2. The spectrum of currently available medical methods does not enhance detection of many diseases, primarily due to technology limitations and their complexities, causing a delay in diagnosis.1-3 For this reason, there is an urgent need for inexpensive and minimally invasive technology that would allow efficient early detection, stratifying the population for a personalized therapy, and for rapid bed-side assessment of treatment efficacy. An emerging approach that has a high potential to fulfill these needs is based on the so-called “volatolomics”, viz. chemical processes involving profiles of highly volatile organic compounds (VOCs) which are by-products of metabolic and pathological processes and are emitted from various body fluids including breath, skin, urine, blood, and others. 3- 6
3:15 p.m.
33.5 Flexible Graphene Hall Sensors with High Sensitivity, L. Huang, Z. Zhang, B. Chen, and L.-M. Peng, Peking University
Graphene has an extremely-thin body and high mobility and is thus an outstanding material for constructing ultra-sensitive Hall sensors. In this work, we massively fabricated graphene Hall elements (GHEs) with sensitivity up to 2300 V/T, and demonstrated flexible GHEs with high linearity and high stability against bending.
3:40 p.m.
33.6 Suspended AlGaN/GaN Membrane Devices with Recessed Open Gate Areas for Ultra-low-Power Air Quality Monitoring, P. Offermans, A. Si-Ali, G. Brom-Verheyden, K. Geens*, S. Lenci*, M. Van Hove*, S. Decoutere*, and R. van Schaijk, imec/Holst Centre, *IMEC
We have developed a novel gas sensor platform for ultra-low-power air quality monitoring based on suspended AlGaN/GaN membranes fabricated on 8 inch Si(111) wafers. The device shows excellent sensitivity to NO2 with exceptionally little humidity interference. We show extension of the platform to NH3, H2 and CO2 detection.